SmartTrak® series
คุณสมบัติสินค้า:
The SmartTrak® thermal mass flow meters and mass flow controllers are true multi-gas digital MFC designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time.
หมวดหมู่ : เครื่องวัดและควบคุมอัตราการไหล , SmartTrak® series ,
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- Gas Mass flow meter and controller based on capillary technology with up to 0.5% full scale accuracy
- All wetted parts stainless steel, 0.8 Ra µm electro polished surfaces. Cleanroom assembly possible
- Ranges from 0-10 mln/min to 0-500 ln/min
- Every units has 10 pre-programmed gases, customer selectable
- Choice of customer selectable engineering units, gases, outputs, range, etc.
- Due to the advanced engineering, accuracy for every gas selected
- Operating pressure standard 35 barg
- Suitable for most corrosive and aggressive dry and clean gases
- Optional local display and local setpoint/configuration
- Most analogue and RS232 communication standard on each unit
- Active temperature compensation for temperature independent operation
- Strong direct driven valve
- Optional Modbus communication
- Modbus module with analogue input/outputs and I/O alarm contacts
- Wide choice of elastomers and valve seal materials
- Long term stability sensor
- Free configuration software for MS Windows
- Very low pressure differentials possible due to big valve
- Every unit calibrated with Primary NIST traceable high accuracy reference standard
Tech Specs
Measuring ranges
| Air/Full scale freely selectable | SmartTrak® 100L (Low Flow): 0-10 mln/min to 0-50 ln/min SmartTrak® 100M (Medium Flow): 0-20 to 0-200 ln/min SmartTrak® 100H (High Flow): 0-100 to 0-500 ln/min Flow ranges specified are for an equivalent flow of nitrogen at 1013.25 mbara (760 mm Hg) and 0°C (32°F) For other gases and reference conditions please contact the factory. |
Instrument versions
| “Standard” The economic solution | Accuracy: ± 1.0% of full scale* Turndown ratio: 1 : 50 (Controller), 1 : 100 (Meter) |
| “Hi-Performance” With high accuracy | Accuracy: ± 0.5% of full scale* *An additional error of ±0.25% may apply for analogue signals |
Performance Data
| Media (real gas calibration) | All gases and gas mixtures that are compatible with the selected material. There might be limitations to some corrosive gases |
| Response time | 2 seconds (typical) to within ± 2% of final value (includes settling time), faster or slower available upon request (controllers only) |
| Repeatability | ± 0.2% of full scale (according to SEMI standard E56-0309) |
| Longterm stability | Typical < 2% of measured value / year |
| Power supply | Mass Flow Meters: 15-24 VDC ±10%, (230 mA, regulated) Mass Flow Controllers: C100L: 24 VDC ±10% (500 mA, regulated) C100M: 24 VDC ±10%, (800 mA, regulated) C100H: 24 VDC ±10%, (1260 mA, regulated) (ripple should not exceed 100 mV peak-to-peak) |
| Operation pressure | 0-35 barg (0 – 500 psig) |
| Temperature (environment/gas) | 0 – 50°C (32 – 122°F) |
| Pressure sensitivity | <0.15% / bar (<0.01% / psi) FS (typical N2, horizontal mount) |
| Temperature sensitivity | <0.05% FS measuring range type per 1°C (<0.025% per 1°F) |
| Warm-up time | < 15 min for full accuracy |
Materials
| Meter all wetted metal parts | 316SS (1.4404) |
| Controller body/sensor materials | 316SS (1.4404) |
| Controllers valve post materials | C100L/C101: 316SS/410SS/430SS (1.4404/1.4006/1.4016) C100M: 416SS/430SS (1.4005/1.4016) C100H: 316SS/416SS/430SS (1.4404/1.4005/1.4016) |
| Electronic Housing | Powder coated steel |
| Seals | FKM (Viton®) Options: Neoprene |
| Valve seals | FKM (Viton®) Options: Neoprene, Kalrex® |
Integration & Installation
| Output signals analog | Linear 4–20 mA or 0-20 mA, 500 ohms maximum loop resistance and one of the following (user selectable): Linear 0–5 VDC, 1000 ohms minimum load resistance Linear 0-10 VDC, 1000 ohms minimum load resistance Linear 1-5 VDC, 1000 ohms minimum load resistance |
| Setpoint signals analog | Analog (choice of one, user selectable): Linear 4–20 mA, 0-20 mA. 0–5 VDC, 0-10 VDC, 1-5 VDC |
| Output signals digital | RS232 Optional: RS485; Modbus RTU (Slave) |
| Process connection | Fittings included. Options: Swagelok® (Compression), VCR, VCO, NPT |
| Inlet section | None required |
| Electrical connection | D-15 High density plug (15 pins) female |
| Mounting orientation | All orientations are possible but must be defined at time of order |
Safety
| Burst pressure | 52 bar (240 psi) |
| Leak rate | < 1 x 10-9 mbar l/s He |
| Ingress protection class | IP20 |
| EMC | EN 61326-1 |
| ATEX Certification | None |
