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SmartTrak® series

Name: SmartTrak® series
SKU: SmartTrak® series
Availability: InStock

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The SmartTrak® thermal mass flow meters and mass flow controllers are true multi-gas digital MFC designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time.

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Categories : Mass Flow Meter and Mass Flow Controller , SmartTrak® series ,

Gas Mass flow meter and controller based on capillary technology with up to 0.5% full scale accuracy
All wetted parts stainless steel, 0.8 Ra µm electro polished surfaces. Cleanroom assembly possible
Ranges from 0-10 mln/min to 0-500 ln/min
Every units has 10 pre-programmed gases, customer selectable
Choice of customer selectable engineering units, gases, outputs, range, etc.
Due to the advanced engineering, accuracy for every gas selected
Operating pressure standard 35 barg
Suitable for most corrosive and aggressive dry and clean gases
Optional local display and local setpoint/configuration
Most analogue and RS232 communication standard on each unit
Active temperature compensation for temperature independent operation
Strong direct driven valve
Optional Modbus communication
Modbus module with analogue input/outputs and I/O alarm contacts
Wide choice of elastomers and valve seal materials
Long term stability sensor
Free configuration software for MS Windows
Very low pressure differentials possible due to big valve
Every unit calibrated with Primary NIST traceable high accuracy reference standard

Tech Specs

Measuring ranges

Air/Full scale freely selectable

SmartTrak® 100L (Low Flow): 0-10 mln/min to 0-50 ln/min
SmartTrak® 100M (Medium Flow): 0-20 to 0-200 ln/min
SmartTrak® 100H (High Flow): 0-100 to 0-500 ln/min
Flow ranges specified are for an equivalent flow of nitrogen at 1013.25 mbara
(760 mm Hg) and 0°C (32°F)
For other gases and reference conditions please contact the factory.

Instrument versions

“Standard”
The economic solution

Accuracy: ± 1.0% of full scale*
Turndown ratio: 1 : 50 (Controller), 1 : 100 (Meter)

“Hi-Performance”
With high accuracy

Accuracy: ± 0.5% of full scale*
Including 10 point certificate
Hi-performance is only possible for:
Flow range: up to 50 slpm or nlpm (valid from 10 to 100% of the calibrated range)
Gases: Air, Nitrogen, Helium or Argon
Other gases and flow: Contact the factory
Only valid for units up to an operating pressure of 10 barg and over the temperature range
10°C to 30°C in a horizontal position.
The accuracy is only guaranteed under calibrated conditions and is only valid for a period of 6 months after the date of calibration.
Valid for 10 to 100% of FS.

*An additional error of ±0.25% may apply for analogue signals

Performance Data

Media (real gas calibration)	All gases and gas mixtures that are compatible with the selected material. There might be limitations to some corrosive gases
Response time	2 seconds (typical) to within ± 2% of final value (includes settling time), faster or slower available upon request (controllers only)
Repeatability	± 0.2% of full scale (according to SEMI standard E56-0309)
Longterm stability	Typical < 2% of measured value / year
Power supply	Mass Flow Meters: 15-24 VDC ±10%, (230 mA, regulated) Mass Flow Controllers: C100L: 24 VDC ±10% (500 mA, regulated) C100M: 24 VDC ±10%, (800 mA, regulated) C100H: 24 VDC ±10%, (1260 mA, regulated) (ripple should not exceed 100 mV peak-to-peak)
Operation pressure	0-35 barg (0 – 500 psig)
Temperature (environment/gas)	0 – 50°C (32 – 122°F)
Pressure sensitivity	<0.15% / bar (<0.01% / psi) FS (typical N2, horizontal mount)
Temperature sensitivity	<0.05% FS measuring range type per 1°C (<0.025% per 1°F)
Warm-up time	< 15 min for full accuracy

Materials

Meter all wetted metal parts	316SS (1.4404)
Controller body/sensor materials	316SS (1.4404)
Controllers valve post materials	C100L/C101: 316SS/410SS/430SS (1.4404/1.4006/1.4016) C100M: 416SS/430SS (1.4005/1.4016) C100H: 316SS/416SS/430SS (1.4404/1.4005/1.4016)
Electronic Housing	Powder coated steel
Seals	FKM (Viton®) Options: Neoprene
Valve seals	FKM (Viton®) Options: Neoprene, Kalrex®

Integration & Installation

Output signals analog	Linear 4–20 mA or 0-20 mA, 500 ohms maximum loop resistance and one of the following (user selectable): Linear 0–5 VDC, 1000 ohms minimum load resistance Linear 0-10 VDC, 1000 ohms minimum load resistance Linear 1-5 VDC, 1000 ohms minimum load resistance
Setpoint signals analog	Analog (choice of one, user selectable): Linear 4–20 mA, 0-20 mA. 0–5 VDC, 0-10 VDC, 1-5 VDC
Output signals digital	RS232 Optional: RS485; Modbus RTU (Slave)
Process connection	Fittings included. Options: Swagelok® (Compression), VCR, VCO, NPT
Inlet section	None required
Electrical connection	D-15 High density plug (15 pins) female
Mounting orientation	All orientations are possible but must be defined at time of order