d·flux multi series
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The d·flux multi series is a fast and reliable multi-parameter mass flow meter for gases with measurement outputs for mass, volumetric and normalized flow, pressure and temperature. One of the many advantages of this laminar flow meter is the ability to easily switch to a different gas without a loss in accuracy.
หมวดหมู่ : เครื่องวัดและควบคุมอัตราการไหล , d·flux multi series ,
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Meter and Controller
The unit is available as meter or with a strong integrated control valve as controller.
State-of-the-art communication
Advanced Modbus communication & analog output.
Optional Profinet or EtherCAT interface available (Ethernet IP available soon)
Wireless device access with the free Vögtlin Connect app
Easy device access and configuration of many parameters with our free Android app (Bluetooth®).
Tech Specs
Measuring Ranges
| Standard ranges (air / user adjustable)¹ | LFE1400 from 0-1000 ln/min to 0-1400 ln/min LFE1000 from 0-700 ln/min to 0-1000 ln/min LFE700 from 0-500 ln/min to 0-700 ln/min LFE500 from 0-350 ln/min to 0-500 ln/min |
| Gases | Max. range | Core | Prime | Prime H2 |
| Air | 0-1400 ln/min | ✓ | ✓ | ✓ |
| N2 | 0-1400 ln/min | ✓ | ✓ | ✓ |
| Ar | 0-1240 ln/min | ✓ | ✓ | ✓ |
| O2³ | 0-1400 ln/min | ✓ | ✓ | ✓ |
| He | 0-1400 ln/min | ✓ | ✓ | |
| CO2 | 0-740 In/min | ✓ | ✓ | |
| CO | 0-1390 In/min | ✓ | ✓ | |
| H2 | 0-2900 In/min | ✓ |
Above are the default gases pre-programmed for each sensor. More gases can be added as options.²
¹Unless clearly stated, the specified flow ranges are for an equivalent flow of air at 1013.25 mbar a (760 mmHg) and 0 °C (32 °F). Other common flow, temperature and pressure units can be selected through the Vögtlin Connect app or the digital communication interface. More information available in the d·flux multi operating instructions.
²Additional gases or gas mixtures can be added to the above standard list. Maximum you can store up to 15 gases per unit. Stored gases can be replaced by another gas or gas mixture (except for air). Programmed gases/mixtures can be selected through the Vögtlin Connect app or the digital communication interface. For other gases, gas mixtures and reference conditions please contact the factory. Only suitable for dry and clean gases.
³Optional O2 cleaning possible upon request.
Profiles
| Customer defined profiles | Up to 15 user programmable profiles Profiles are preset configurations where the customer can set the gas, range, dynamics, totalizers, engineering units and reference conditions for up to 15 different applications |
Performance Data
| Accuracy | A1 Core: ± 0.5% of user full scale ± 1% of measured value. B1 Prime: ± 0.3% of user full scale ± 0.7% of measured value. B2 Prime high accuracy: ± 0.3% of user full scale ± 0.5% of measured value. For hydrogen applications: B3 Prime H2: ± 0.3% of user full scale ± 0.7% of measured value. B4 Prime H2 high accuracy: ± 0.3% of user full scale ± 0.5% of measured value. User full scale = ~70…100% standard range. |
| Media | All gases and gas mixtures that are compatible with the selected materials and for which data is available in the NIST refprop database. Contact the factory for more information. |
| Dynamic range | Fixed dynamics: 1 : 100 for most gases* VADy® dynamics: up to 1 : 1000 (available for meter only) VADy® or a fixed dynamic range can be selected during order process. This setting can be changed at any time using the Vögtlin Connect app. *The dynamic range is gas and pressure dependent, higher pressures means lower dynamic range. |
| Response time | Meter: 120 msec / Controller: 2000 msec (according to SEMI standard SEMI E17-1011)* Update time mass flow value: 10 msec / Sensor sample rate: 1 msec *With optimized filter settings. All filter modes and values can be set through the Vögtlin Connect app or the digital communication interface. |
| Repeatability | ± 0.2% of factory full scale (according to SEMI standard E56-0309) |
| Longterm stability | Typical < 0.2% of measured value / year after tare |
| Power supply | Meter: 15-36 Vdc, (200 mA@24Vdc, regulated) / Controller: 24 Vdc ±10%, (2000 mA@24Vdc, regulated) Power in through M8-4P connection or optionally through D-sub connection (ripple should not exceed 100 mV peak-to-peak) We recommend that the body of this unit is properly connected to ground |
| Operation pressure | 1 to 14 bar a |
| Temperature (environment/gas) | -20 to +60 °C (-4 to 140 °F) |
| Humidity gas | 0-95% Rh (non-condensing) |
| Pressure sensitivity | Prime and Prime H2 sensor: <0.05% factory full scale per bar (typical air). Core sensor: <0.08% of factory full scale + 0.1% of measured value per bar (typical air). |
| Temperature sensitivity | <0.02% FFS* per 1 °C of inlet gas temperature @ 7 bar a pressure *Factory Full Scale (maximum flow range of the device) |
| Accuracy temperature | Typically ± 0.5 °C (not certified) |
| Accuracy absolute pressure | <0.5% MV (not certified) |
| Warm-up time | <2 sec for full accuracy |
Materials
| Wetted parts | Elastomers: FKM, EPDM, FFKM (valve seat). Full FFKM version upon request. Body: Stainless-steel 316L (1.4404). Valve (controller): 316 (1.4401), 416 (1.4005), 430F (1.4104). Inlet filter: Stainless-steel 316 (1.4401), fastening stainless-steel (1.4122) or equivalent. A1 core sensor: Stainless-steel 316Ti (1.4571), silicon, gold, glass, silicone encapsulation, PBT. 30GF, ceramics. B1 + B2 Prime sensor: Stainless-steel 316L (1.4404). B3 + B4 Prime H2 sensor: Stainless-steel 316L (1.4404) with gold coating. |
| Electronic housing | Powder coated stainless steel |
| Integrated inlet filter | 50 micron SS316 (1.4401) filter. Fastener filter material stainless-steel (1.4122) or equivalent. |
| Wetted part surface roughness | 1.6 Ra µm or better (contact factory for lower Ra values) |
Integration & Installation
| Output signals analog | Linear 4–20 mA or customer defined (max 20 mA), user selectable Linear 0–5 Vdc or 0-10 Vdc or customer defined (max 10 Vdc), user selectable mA output: 740 ohms maximum load resistance Volt output: 1000 ohms minimum load resistance All analog outputs are galvanically separated and protected. If used with analog signals add + as before 0.2% of FFS to the uncertainty |
| Setpoint signals analog | Linear 4–20 mA or customer defined, (max 20 mA) user selectable Linear 0–5 Vdc or 0-10 Vdc or customer defined, (max 10 Vdc) user selectable |
| Output signals digital | RS-485 (Modbus RTU 2-wire) The Modbus address can be set with 2 rotary switches on the outside of the housing. All Modbus settings can be set through the Vögtlin Connect app. |
| Optional Profinet or EtherCAT | Dual port RJ45 with integrated switch (easy to daisy chain) RJ45 LEDs indicating link and activity on the network / Ethernet speed: maximum 100 Mbit ProfiNet: PROFINET IO specification v2.33 / PROFINET IO devices conformance class B (RT) / Endianness: conform Siemens S7 (big) EtherCAT: IEC standard IEC61158 / Endianness: little EtherNet/IP™ coming soon. |
| Configuration interface | Wireless Vögtlin Connect app available from Google Play store |
| Output I/O MOSFET | On/off for external shut-off valve or alarm available through M8-4P connector Contact type: MOSFET (open drain/collector) Maximum voltage: 36 Vdc, Max current 500 mA (Polyfuse protected) |
| Electrical connection | 9-pin D-sub male (power and signals) and M8-4P connector (Power + I/O MOSFET output) Optional 2 x RJ45 (EtherCAT / Profinet) |
| Process connection | 1″ BSPP female (1″G) Optional ½” BSPP, 1″ Compression or Tri-clamp 50.5mm flange size (ISO) (see accessories tab) |
| Inlet section | None required if our standard inlet filter / conditioner is installed Without filter / conditioner a 10 D straight inlet is recommended The inlet filter can be deselected at time of order |
| Pressure drop | Meter: Standard 400 mbar at factory full scale air venting to atmosphere (with filter / conditioner) Optional: 325 mbar at factory full scale air venting to atmosphere (without filter / conditioner) Pressure drop is dependent on operating pressure (higher pressure = lower pressure drop) For more information please refer to your sales partner Controller: Min. pressure difference required for 1400 ln/min (air) < 2 bar Contact your sales partner for other pressure drop requirements |
| Mounting orientation | All orientations are possible |
| Weight | Meter: 3.7 kg, Controller: 8.7 kg (excluding ethernet and fittings) |
Safety
| Test pressure after production | 28 bar a |
| Maximum overpressure sensor | Core Sensor: 28 bar a, Prime and Prime H2 Sensor: 90 bar a |
| Burst pressure | Meter: 100 bar a, Controller: 70 bar a |
| Leak rate | < 1 x 10-6 mbar l/s He |
| Ingress protection class | IP54, if IP54-D-sub is used (see accessories tab) For optional EtherCAT/Profinet: IP40 |
Certifications
| EMC | IEC/EN 61326-1, IEC/EN 61000-6-2/4 |
| ATEX certification | None |
| Material certificates | To be released in 2023 (available for meter only) |
| FDA compliance | To be released in 2023 (available for meter only) |
| PED | Fully compliant. Since the unit has 1″ process connection, complies with the SEP, as defined in article 4, paragraph 3 of the Pressure Equipment Directive (PED) (2014/68/EU) |
| RoHS / REACH | All components comply with Directive 2002/95/EC (RoHS) and the REACH guidelines |
| Warranty | 3 years, excluding cases of corrosion |
